Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 1/09/2009 → 31/08/2010 |
Collaborative partners
- King's College London (lead)
- Tongji University
Extreme ultraviolet lithography system based on broadband multilayer optics
- Michette, Alan (Primary Investigator)
- Anastasi, Peter (Co-Investigator)
- Choi, Peter (Co-Investigator)
- Wang, Zhanshan (Co-Investigator)
Project: Research