A novel MOEMS based adaptive optics for X-ray focusing

M Y Al Aioubi; P D Prewett; S E Huq; V Djakov; A G Michette

doi:10.1016/j.mee.2006.01.107

A novel MOEMS based adaptive optics for X-ray focusing

M Y Al Aioubi, P D Prewett, S E Huq, V Djakov, A G Michette

Physics

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

This work presents the design and micro fabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. (c) 2006 Elsevier B.V. All rights reserved

Original language	English
Pages (from-to)	1321 - 1325
Number of pages	5
Journal	MICROELECTRONIC ENGINEERING
Volume	83
Issue number	4-9
DOIs	https://doi.org/10.1016/j.mee.2006.01.107
Publication status	Published - Apr 2006

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10.1016/j.mee.2006.01.107

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title = "A novel MOEMS based adaptive optics for X-ray focusing",

abstract = "This work presents the design and micro fabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. (c) 2006 Elsevier B.V. All rights reserved",

author = "{Al Aioubi}, {M Y} and Prewett, {P D} and Huq, {S E} and V Djakov and Michette, {A G}",

year = "2006",

month = apr,

doi = "10.1016/j.mee.2006.01.107",

language = "English",

volume = "83",

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journal = "MICROELECTRONIC ENGINEERING",

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T1 - A novel MOEMS based adaptive optics for X-ray focusing

AU - Al Aioubi, M Y

AU - Prewett, P D

AU - Huq, S E

AU - Djakov, V

AU - Michette, A G

PY - 2006/4

Y1 - 2006/4

N2 - This work presents the design and micro fabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. (c) 2006 Elsevier B.V. All rights reserved

AB - This work presents the design and micro fabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. (c) 2006 Elsevier B.V. All rights reserved

U2 - 10.1016/j.mee.2006.01.107

DO - 10.1016/j.mee.2006.01.107

M3 - Article

VL - 83

SP - 1321

EP - 1325

JO - MICROELECTRONIC ENGINEERING

JF - MICROELECTRONIC ENGINEERING

IS - 4-9

ER -

A novel MOEMS based adaptive optics for X-ray focusing

Abstract

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