Broadband Mo/Si multilayer transmission phase retarders for the extreme ultraviolet

Zhanshan Wang; Hongchang Wang; Franz Schaefers; Zhong Zhang; Shumin Zhang; Fengli Wang; Wenjuan Wu; Lingyan Chen; Alan Michette; Slawka Pfauntsch; Keith Powell; Jingtao Zhu; Andreas Gaupp; Mingqi Cui; Lijuan Sun; Jie Zhu; Mike MacDonald

doi:10.1063/1.2431761

Broadband Mo/Si multilayer transmission phase retarders for the extreme ultraviolet

Zhanshan Wang, Hongchang Wang, Franz Schaefers, Zhong Zhang, Shumin Zhang, Fengli Wang, Wenjuan Wu, Lingyan Chen, Alan Michette, Slawka Pfauntsch, Keith Powell, Jingtao Zhu, Andreas Gaupp, Mingqi Cui, Lijuan Sun, Jie Zhu, Mike MacDonald

Physics

Research output: Contribution to journal › Article › peer-review

41 Citations (Scopus)

Abstract

Experimental results on aperiodic broadband transmission molybdenum/silicon multilayer phase retarders for the extreme ultraviolet range are presented. The broadband phase retarders were designed using a numerical method and made using direct current magnetron sputtering on silicon nitride membrane. The polarization properties of these aperiodic transmission phase retarders have been investigated using the soft x-ray polarimeter at BESSY-II. The measured phase shift was about 42° in the wavelength range of 13.8–15.5 nm, and the corresponding s-component transmission Ts decreased from 6% to 2% with increasing wavelength.

Original language	English
Article number	031901
Journal	APPLIED PHYSICS LETTERS
Volume	90
Issue number	3
DOIs	https://doi.org/10.1063/1.2431761
Publication status	Published - 2007

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10.1063/1.2431761

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title = "Broadband Mo/Si multilayer transmission phase retarders for the extreme ultraviolet",

abstract = "Experimental results on aperiodic broadband transmission molybdenum/silicon multilayer phase retarders for the extreme ultraviolet range are presented. The broadband phase retarders were designed using a numerical method and made using direct current magnetron sputtering on silicon nitride membrane. The polarization properties of these aperiodic transmission phase retarders have been investigated using the soft x-ray polarimeter at BESSY-II. The measured phase shift was about 42° in the wavelength range of 13.8–15.5 nm, and the corresponding s-component transmission Ts decreased from 6% to 2% with increasing wavelength.",

author = "Zhanshan Wang and Hongchang Wang and Franz Schaefers and Zhong Zhang and Shumin Zhang and Fengli Wang and Wenjuan Wu and Lingyan Chen and Alan Michette and Slawka Pfauntsch and Keith Powell and Jingtao Zhu and Andreas Gaupp and Mingqi Cui and Lijuan Sun and Jie Zhu and Mike MacDonald",

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doi = "10.1063/1.2431761",

language = "English",

volume = "90",

journal = "APPLIED PHYSICS LETTERS",

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TY - JOUR

T1 - Broadband Mo/Si multilayer transmission phase retarders for the extreme ultraviolet

AU - Wang, Zhanshan

AU - Wang, Hongchang

AU - Schaefers, Franz

AU - Zhang, Zhong

AU - Zhang, Shumin

AU - Wang, Fengli

AU - Wu, Wenjuan

AU - Chen, Lingyan

AU - Michette, Alan

AU - Pfauntsch, Slawka

AU - Powell, Keith

AU - Zhu, Jingtao

AU - Gaupp, Andreas

AU - Cui, Mingqi

AU - Sun, Lijuan

AU - Zhu, Jie

AU - MacDonald, Mike

PY - 2007

Y1 - 2007

N2 - Experimental results on aperiodic broadband transmission molybdenum/silicon multilayer phase retarders for the extreme ultraviolet range are presented. The broadband phase retarders were designed using a numerical method and made using direct current magnetron sputtering on silicon nitride membrane. The polarization properties of these aperiodic transmission phase retarders have been investigated using the soft x-ray polarimeter at BESSY-II. The measured phase shift was about 42° in the wavelength range of 13.8–15.5 nm, and the corresponding s-component transmission Ts decreased from 6% to 2% with increasing wavelength.

AB - Experimental results on aperiodic broadband transmission molybdenum/silicon multilayer phase retarders for the extreme ultraviolet range are presented. The broadband phase retarders were designed using a numerical method and made using direct current magnetron sputtering on silicon nitride membrane. The polarization properties of these aperiodic transmission phase retarders have been investigated using the soft x-ray polarimeter at BESSY-II. The measured phase shift was about 42° in the wavelength range of 13.8–15.5 nm, and the corresponding s-component transmission Ts decreased from 6% to 2% with increasing wavelength.

U2 - 10.1063/1.2431761

DO - 10.1063/1.2431761

M3 - Article

VL - 90

JO - APPLIED PHYSICS LETTERS

JF - APPLIED PHYSICS LETTERS

IS - 3

M1 - 031901

ER -

Broadband Mo/Si multilayer transmission phase retarders for the extreme ultraviolet

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