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Broadband Mo/Si multilayer transmission phase retarders for the extreme ultraviolet
Zhanshan Wang, Hongchang Wang, Franz Schaefers, Zhong Zhang, Shumin Zhang, Fengli Wang, Wenjuan Wu, Lingyan Chen, Alan Michette, Slawka Pfauntsch, Keith Powell, Jingtao Zhu, Andreas Gaupp, Mingqi Cui, Lijuan Sun, Jie Zhu, Mike MacDonald
Research output: Contribution to journal › Article › peer-review
41
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(Scopus)