Maskless nanofabrication using the electrostataic attachment of gold particles to electrically patterned surfaces

Research output: Contribution to journal › Article › peer-review

48 Citations (Scopus)

Original language	English
Pages (from-to)	671 - 674
Number of pages	4
Journal	MICROELECTRONIC ENGINEERING
Volume	61-62
DOIs	https://doi.org/10.1016/S0167-9317(02)00441-0
Publication status	Published - Jul 2002

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@article{b49d45aed5d6461fb9fa4ce178c55341,

title = "Maskless nanofabrication using the electrostataic attachment of gold particles to electrically patterned surfaces",

author = "P Mesquida and A Stemmer",

year = "2002",

month = jul,

doi = "10.1016/S0167-9317(02)00441-0",

language = "English",

volume = "61-62",

pages = "671 -- 674",

journal = "MICROELECTRONIC ENGINEERING",

publisher = "Elsevier",

}

TY - JOUR

T1 - Maskless nanofabrication using the electrostataic attachment of gold particles to electrically patterned surfaces

AU - Mesquida, P

AU - Stemmer, A

PY - 2002/7

Y1 - 2002/7

U2 - 10.1016/S0167-9317(02)00441-0

DO - 10.1016/S0167-9317(02)00441-0

M3 - Article

VL - 61-62

SP - 671

EP - 674

JO - MICROELECTRONIC ENGINEERING

JF - MICROELECTRONIC ENGINEERING

ER -