Novel microstructured adaptive X-ray optics

A G Michette; P D Prewett; A K Powell; S J Pfauntsch; K D Atkinson; B Boonliang

Novel microstructured adaptive X-ray optics

A G Michette, P D Prewett, A K Powell, S J Pfauntsch, K D Atkinson, B Boonliang

Physics

Research output: Contribution to journal › Conference paper

10 Citations (Scopus)

Abstract

Advances in the techniques of micro- and nano-fabrication mean that it is now possible to design and make microstructured optical arrays (MOAs). Due to greater flexibility in the choice of channel geometry and layout, these offer much better performances than current grazing incidence optics, which are limited to circular, square or close-packed hexagonal channels. In addition, MOAs can have built-in adaptivity and controllable focal length - they can therefore act as zoom lenses. Potential applications include x-ray microprobing, EUV lithography and confocal x-ray microscopy.

Original language	English
Pages (from-to)	277 - 280
Number of pages	4
Journal	JOURNAL DE PHYSIQUE 4
Volume	104
Publication status	Published - Mar 2003
Event	7th International Conference on X-Ray Microscopy - GRENOBLE, France Duration: 1 Jan 2003 → …

Cite this

@article{64ce6b4f59ec46d49d1942b650c1919f,

title = "Novel microstructured adaptive X-ray optics",

abstract = "Advances in the techniques of micro- and nano-fabrication mean that it is now possible to design and make microstructured optical arrays (MOAs). Due to greater flexibility in the choice of channel geometry and layout, these offer much better performances than current grazing incidence optics, which are limited to circular, square or close-packed hexagonal channels. In addition, MOAs can have built-in adaptivity and controllable focal length - they can therefore act as zoom lenses. Potential applications include x-ray microprobing, EUV lithography and confocal x-ray microscopy.",

author = "Michette, {A G} and Prewett, {P D} and Powell, {A K} and Pfauntsch, {S J} and Atkinson, {K D} and B Boonliang",

year = "2003",

month = mar,

language = "English",

volume = "104",

pages = "277 -- 280",

journal = "JOURNAL DE PHYSIQUE 4",

publisher = "EDP Sciences",

note = "7th International Conference on X-Ray Microscopy ; Conference date: 01-01-2003",

}

TY - JOUR

T1 - Novel microstructured adaptive X-ray optics

AU - Michette, A G

AU - Prewett, P D

AU - Powell, A K

AU - Pfauntsch, S J

AU - Atkinson, K D

AU - Boonliang, B

PY - 2003/3

Y1 - 2003/3

N2 - Advances in the techniques of micro- and nano-fabrication mean that it is now possible to design and make microstructured optical arrays (MOAs). Due to greater flexibility in the choice of channel geometry and layout, these offer much better performances than current grazing incidence optics, which are limited to circular, square or close-packed hexagonal channels. In addition, MOAs can have built-in adaptivity and controllable focal length - they can therefore act as zoom lenses. Potential applications include x-ray microprobing, EUV lithography and confocal x-ray microscopy.

AB - Advances in the techniques of micro- and nano-fabrication mean that it is now possible to design and make microstructured optical arrays (MOAs). Due to greater flexibility in the choice of channel geometry and layout, these offer much better performances than current grazing incidence optics, which are limited to circular, square or close-packed hexagonal channels. In addition, MOAs can have built-in adaptivity and controllable focal length - they can therefore act as zoom lenses. Potential applications include x-ray microprobing, EUV lithography and confocal x-ray microscopy.

UR - http://www.scopus.com/inward/record.url?scp=0038363927&partnerID=8YFLogxK

M3 - Conference paper

VL - 104

SP - 277

EP - 280

JO - JOURNAL DE PHYSIQUE 4

JF - JOURNAL DE PHYSIQUE 4

T2 - 7th International Conference on X-Ray Microscopy

Y2 - 1 January 2003

ER -

Novel microstructured adaptive X-ray optics

Abstract

Other files and links

Fingerprint

Cite this